关键词: 失效磷酸基抛光液, 氢氧化钠, 氢氟酸, 锥冰晶石

Abstract: A novel technology on direct preparation of nanometer chiolite from expired phosphoric acid-based polishing agent is investigated. With the reaction temperature 50 ℃, reaction time 40 min, stirring rate 200 r/min, dosage of hydrofluoric acid sodium hydroxide at 1.2 and 1.0 times of stoichiometry respectively and state time 1 day, the removal rate of aluminum in expired phosphoric acid-based polishing liquid reaches up to above 90%, and the productivity of chiolite is about 8%~10% of the polishing liquid with pellet diameter of chiolite about 25~30 nm. Compared to the traditional processing craft with expired phosphoric acid-based polishing liquid, the novel technology can not only make the expired phosphoric acid-based polishing liquid regeneration, but also can easily get the excellent product with high purity. It will be an ideal perspective in application and dissemination. 

Key words: Expired phosphoric acid-based polishing liquid, NaOH, HF, Chiolite