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金属矿山 ›› 2023, Vol. 52 ›› Issue (11): 55-66.

• “矿物材料基础理论与应用技术”专题 • 上一篇    下一篇

基于基板界面调控的半导体材料气敏性特征研究进展

闫呈浩 卢 瑞 唐 朝 李 昂 白金州 赵思凯 沈岩柏
  

  1. 东北大学资源与土木工程学院,辽宁 沈阳 110819
  • 出版日期:2023-11-15 发布日期:2024-01-02
  • 基金资助:
    国家自然科学基金项目(编号:51674067,52274255);“十三五”国家重点研发计划项目(编号:2020YFB2008702);中央高校基本科研业务费专项(编号:N2201008,N2201004)。

Status on Gas Sensing Properties of Semiconductor Materials Based on Substrate Interface Control

YAN Chenghao LU Rui TANG Chao LI Ang BAI Jinzhou ZHAO Sikai SHEN Yanbai #br#   

  1. School of Resources and Civil Engineering,Northeastern University,Shenyang 110819,China
  • Online:2023-11-15 Published:2024-01-02

摘要: 基板界面对于气敏材料的结晶生长和气敏特性至关重要,不仅能够为晶体的生长提供成核位点,还能 调控材料的微观形貌,并进一步影响材料的气敏特性。 重点归纳和总结了硅基板、玻璃基板、Al2O3 基板、AAO 基板等 常规基板以及黏土矿物基板对气敏材料生长特性和气敏特性的影响。 分析了各种基板界面结构特性、界面调控方式 及效果、气敏材料生长及特性等。 常规基板具有较为稳定的物理化学性质,有助于获得结晶程度高、比表面积大、气敏 效果佳的气敏材料。 但仍存在一些不利于材料生长的结构特性,如表面光滑、晶格失配、耐高温及酸碱程度差等问题, 需要在材料生长过程中对基板进行界面调控处理,以达到改善缺陷、获得具有优越性能的纳米气敏材料的目的。 黏 土矿物基板能够解决常规基板存在的一些问题,但基板的结构和性能仍需不断完善和优化。 基于国内外研究进展, 探讨了贵金属催化剂层调控、多孔化处理、种子层预处理和二元复合材料制备等界面调控方法对气敏材料微观形貌 和气敏性能的影响,并对基板法制备气敏材料的未来发展方向进行了展望。 基板的改进和研发将提升气敏材料的性 能,推动半导体气体传感器在矿山的应用,对矿业资源的绿色开发具有重要意义。

关键词: 基板, 界面调控, 气敏材料, 气敏特性

Abstract: The substrate interface plays a very important role in the crystal growth and gas sensing properties of gas sensing materials. It not only provides nucleation sites for the growth of crystals,but also controls the microstructural morphology of the sensing materials,thereby further affecting their gas sensing properties. This paper mainly summarizes the effects of conventional substrates such as silicon substrate,glass substrate,Al2O3 substrate,AAO substrate and clay mineral substrate on the growth characteristics and gas sensing properties of gas sensing materials. The structural characteristics of several substrates, the methods and properties of interface control,and the growth and characteristics of gas sensing materials were analyzed. The conventional substrates have relatively stable physical and chemical properties,which is beneficial to obtain gas sensing materials with high crystallinity,large specific surface area and excellent gas sensing properties. However,there are still some structural characteristics that are not conducive to material growth,such as smooth surface,lattice mismatch,low high-temperature resistance and poor acid / alkali resistance. Therefore,the interface control of the substrate in the material growth process is necessary to ameliorate defects and obtain gas sensing nanomaterials with superior performance. Clay mineral substrate can solve some problems existing in conventional substrate,but the structure and performance of substrate still need to be improved and optimized. Then,based on the research progress at home and abroad,the effects of interfacial control methods such as precious metal catalyst layer regulation,porosity treatment,seed layer pretreatment and binary composite preparation on the micro-morphology and gas sensitive properties of gas-sensing nanomaterials were discussed. The future development direction of gas-sensing nanomaterials prepared by substrate method was also prospected. The improvement and development of the substrate will improve the performance of gas-sensing nanomaterials and promote the application of semiconductor gas sensors in mines,which is of great significance to the green development of mining resources.

Key words: substrate,interface control,gas sensing materials,gas sensing properties