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金属矿山 ›› 2026, Vol. 55 ›› Issue (5): 237-245.

• 矿物工程 • 上一篇    下一篇

外场强化技术在高纯石英砂制备中的应用进展

熊 欢1 白子杨2 李茂辉2 何玉鹏1 王建军2 陆有军2,3   

  1. 1. 宁夏盾源聚芯半导体科技股份有限公司,宁夏 银川 750021;2. 北方民族大学材料科学与工程学院,
    宁夏 银川 750021;3. 贺兰山实验室,宁夏 银川 750021
  • 出版日期:2026-05-15 发布日期:2026-06-03
  • 通讯作者: 李茂辉(1988—),男,副教授,博士,硕士研究生导师。
  • 作者简介:熊 欢(1990—),女,工程师,硕士。
  • 基金资助:
    银川市科技计划项目(编号:2024GXZD012);宁夏回族自治区重点研发计划(重大)项目(编号:2024BEE01003)。

Application of Field Strengthening Technology in Preparation of High-purity Quartz Sand

XIONG Huan1 BAI Ziyang2 LI Maohui2 HE Yupeng1 WANG Jianjun2 LU Youjun2,3   

  1. 1. Ningxia SiFusion Co. ,Ltd. ,Yinchuan 750021,China;2. School of Materials Science and Engineering,Northern Minzu University,
    Yinchuan 750021,China;3. Helanshan Laboratory,Yinchuan 750021,China
  • Online:2026-05-15 Published:2026-06-03

摘要: 高纯石英砂(SiO2≥99. 99%)作为半导体级石英坩埚的核心原料,其杂质赋存形态与含量直接决定坩埚
性能及单晶硅生长质量。传统提纯工艺面临热力学能垒高、晶格包裹体杂质脱除效率低及流程复杂等瓶颈。外场强
化技术通过非接触式能量输入机制,为突破上述限制提供了新路径。本文系统综述了磁场、微波场、超声场、温度场及
压力场等多物理场在高纯石英砂提纯中的作用机理与应用进展。磁选技术基于矿物磁化率差异实现磁性杂质的初
步分离,高梯度及超导磁选显著提升了对弱磁性微粒的捕获能力;微波技术利用选择性加热与微爆裂效应促进包裹
体杂质释放,超声技术通过空化效应强化界面反应与杂质剥离,二者协同可显著提高化学试剂利用率;温压场通过诱
导石英多态相变与晶格重构,实现杂质元素的深度激活与选择性迁移。进一步总结了磁选—酸洗、微波—酸浸、超
声—浮选及温压—化学等多场协同工艺的研究进展,指出针对晶格铝等类质同象杂质的联合脱除是实现高纯化的关
键。最后,分析了外场强化技术在实际应用中面临的设备成本高、工艺参数难精确调控及规模化生产难度大等挑战,
并提出未来应聚焦新型外场机制探索、核心装备国产化突破及基于矿源特性的定制化工艺开发,以推动高纯石英砂
绿色、高效及低成本制备技术的发展。

关键词: 高纯石英砂 , 外场强化技术 , 非接触式能量输入 , 杂质迁移机制 , 定制化制备

Abstract: As the core raw material for semiconductor-grade quartz crucibles,the occurrence form and content of impurities
in high-purity quartz sand (SiO2≥99. 99%) directly determine crucible performance and the growth quality of monocrystalline
silicon. Conventional purification processes face bottlenecks such as high thermodynamic energy barriers,low removal efficiency
of lattice-hosted inclusions,and complex process flows. External field enhancement technology,utilizing a non-contact
energy input mechanism,offers a new pathway to overcome these limitations. This paper systematically reviews the mechanisms
and application progress of multi-physical fields,including magnetic,microwave,ultrasonic,temperature,and pressure fields in
the purification of high-purity quartz sand. Magnetic separation technology achieves preliminary removal of magnetic impurities
based on differences in mineral magnetic susceptibility;High-gradient and superconducting magnetic separation significantly
enhance the capture capability for weakly magnetic particles. Microwave technology promotes the release of inclusions through
selective heating and micro-explosion effects,while ultrasonic technology enhances interfacial reactions and impurity detachment
via cavitation effects;Their combination markedly improves the utilization efficiency of chemical reagents. Temperaturepressure
fields induce polymorphic phase transitions and lattice reconstruction of quartz,enabling deep activation and selective
migration of impurity elements. Recent progress in multi-field synergistic processes,such as magnetic separation-acid leaching,
microwave-acid leaching,ultrasonic-flotation,and temperature-pressure-chemical treatment,is further summarized. It is emphasized
that the combined removal of isomorphous impurities such as lattice-bound aluminum is key to achieving high purity. Finally,
challenges in the practical application of external field enhancement technology,including high equipment costs,difficulty
in precise control of process parameters,and obstacles to large-scale production,are analyzed. Future research should focus on exploring novel external field mechanisms,achieving breakthroughs in the domestic core equipment development,and customizing
processes based on ore source characteristics,thereby advancing the development of green,efficient,and low-cost preparation
technologies for high-purity quartz sand.

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