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Metal Mine ›› 2023, Vol. 52 ›› Issue (11): 55-66.

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Status on Gas Sensing Properties of Semiconductor Materials Based on Substrate Interface Control

YAN Chenghao LU Rui TANG Chao LI Ang BAI Jinzhou ZHAO Sikai SHEN Yanbai #br#   

  1. School of Resources and Civil Engineering,Northeastern University,Shenyang 110819,China
  • Online:2023-11-15 Published:2024-01-02

Abstract: The substrate interface plays a very important role in the crystal growth and gas sensing properties of gas sensing materials. It not only provides nucleation sites for the growth of crystals,but also controls the microstructural morphology of the sensing materials,thereby further affecting their gas sensing properties. This paper mainly summarizes the effects of conventional substrates such as silicon substrate,glass substrate,Al2O3 substrate,AAO substrate and clay mineral substrate on the growth characteristics and gas sensing properties of gas sensing materials. The structural characteristics of several substrates, the methods and properties of interface control,and the growth and characteristics of gas sensing materials were analyzed. The conventional substrates have relatively stable physical and chemical properties,which is beneficial to obtain gas sensing materials with high crystallinity,large specific surface area and excellent gas sensing properties. However,there are still some structural characteristics that are not conducive to material growth,such as smooth surface,lattice mismatch,low high-temperature resistance and poor acid / alkali resistance. Therefore,the interface control of the substrate in the material growth process is necessary to ameliorate defects and obtain gas sensing nanomaterials with superior performance. Clay mineral substrate can solve some problems existing in conventional substrate,but the structure and performance of substrate still need to be improved and optimized. Then,based on the research progress at home and abroad,the effects of interfacial control methods such as precious metal catalyst layer regulation,porosity treatment,seed layer pretreatment and binary composite preparation on the micro-morphology and gas sensitive properties of gas-sensing nanomaterials were discussed. The future development direction of gas-sensing nanomaterials prepared by substrate method was also prospected. The improvement and development of the substrate will improve the performance of gas-sensing nanomaterials and promote the application of semiconductor gas sensors in mines,which is of great significance to the green development of mining resources.

Key words: substrate,interface control,gas sensing materials,gas sensing properties